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Introduction
3 C onfiguration Options
5 Hardware Specifications
14 KTE Interactive Software Tools
14 Microsoft Windows
15 The Keithley Interactive Test
Environment (KITE)
22 Keithley User Library Tool
(KULT)
23 System Configuration and
Diagnostics (KCON)
23 Keithley External Control
Interface (KXCI)
24 Support Contracts
25 Value-Add Services
25 Upgrades
26 Warranty Information
26 Embedded PC Policy
26 Switch Matrix Support and
Configurations
28 O ptional Accessories


Introduction
The Model 4200-SCS provides a total system solution for DC I-V, C-V,
and pulse characterization and stress-measure/reliability testing of
semiconductor devices and test structures. This advanced parameter
analyzer provides intuitive and sophisticated capabilities for semiconductor
device characterization. The 4200-SCS combines unprecedented
measurement speed and accuracy with an embedded Windows®-based
PC and the Keithley Interactive Test Environment (KITE) to provide a
powerful single-
box solution.
The Keithley Interactive Test Environment allows users to gain familiarity
quickly with tasks such as managing tests and results and generating
reports. Sophisticated and simple test sequencing and external instrument
drivers simplify
performing automated device and wafer testing with
combined I-V and C-V measurements. Our new integrated capacitancevoltage
measurement unit, the Model 4200-CVU, makes C-V measurements
as easy as DC measurements.
The 4200-SCS is modular and configurable. The system supports up to
eight Source-Measure Units, including up to eight high power SMUs with
1A/20W capability. An optional Remote PreAmp extends the resolution of
any Source-Measure Unit from 100fA to 0.1fA.
KTEI (Ver. 7.0) provides software support for DC SMUs and a number of
new instruments. Besides the C-V measurement unit described previously,
it supports a dual-channel pulse generator card (the Model 4205-PG2)
that plugs into one of the Model 4200-SCS’s slots, just like an SMU, and a
choice of dual-channel digital oscilloscopes for time- and voltage-domain
measurements. Together, the pulse generator and oscilloscope make it
simple and cost-effective to integrate pulsing, waveform generation, and
signal observation capabilities into the Model 4200-SCS’s test environment.
Our KTEI software (Ver. 7.0) supports three test application packages
to expand the Model 4200-SCS’s pulsed testing capabilities: 4200-PIV-A
performs charge trapping and isothermal testing for leading-edge CMOS
research; 4200-PIV-Q tests for higher power pulse in III-V, LDMOS,
and other higher frequency FET devices; and 4200-FLASH tests FLASH
embedded
memory devices.